PhotoVoltaic Spectroscopic Reflectometer
The Spectroscopic Reflectometer (SR) is a thin film measurement system based on software for thin film analysis and spectrometers to measure reflectance.
The SR the following quantities can determined for semiconductors, dielectrics, display, optical coating, solar cell, polymers, recordable materials and thin metal films.
Specifications
|
MSR-6G
|
SPECIFICATION
|
MSE-6G
|
|---|---|---|
| 350~ 840 nm | Spectral Range | 250~ 840 (1000) nm |
| Objective lens | Optical Component |
Polarizer/ Lens / Waveplate |
| Multichannel | Spectrometer | Multichannel |
| At 2.1 eV for c-Si Reflectance : Better than 0.1 % on a fixed stage |
Reproducibility | At 2.1 eV for c-Si Δ : Better than 0.01 degree on a fixed stage Ψ : Better than 0.02 degree on a fixed stage |
| Same as above | Stability | Same as above |
| ＜ 2 mm | Spot Size | < 4 mm * 6 mm (variable) |
| 30 cm (W) *15 cm (D) * 30 cm (H), Weight: 17 kg |
Head Size | 30 cm (W) * 15 cm (D) * 30 cm (H), Weight: 20 kg |
| Fixed angle: 0° | Incident angle | Fixed angle: 70°±1° |
| ＜1 s/point | Acquisition speed | ＜6 sec/point |
| Lifetime: 2000 hours | Lamp | Lifetime: 2000 hours |
| Sample | a-Si: H (with/without doping) on glass |
|---|---|
| Substrate dimension | 1500 x 1500 mm |
| Metrology Performance |
|
| Application Fields |
|
| Standard Lead Time | 6 months standard without options |
* Due to the macroscopic roughness of textured SnO₂and ZnO, optical analysis is
extremely difficult when film is grown on this substrate. Thus, any optical
characterization should be performed on a smooth surface.
* Even total thickness on textured SnO2 may be not characterized. (see later report)
Software Ellyreg capabilities
| EllyReg | Software working under window XP, with tutorial and reference (n, k) database |
|---|---|
| Parameters analysis | Thickness Optical constants (n, k) Surface roughness |
| Optical model | Dispersion equation: Forouhi-Bloomer, Cauchy, Lorentz oscillator Effective Medium Approximation |
| Regression Algorithm |
Regression on (cosΔ, tanΨ) Levenberg-marquadt regression algorithms |
Specification Stage for Optical Head Structure
| Structure | Gantry type (Linear motors): X-Y-Z |
|---|---|
| Operation | Step & Repeat |
| Max. Speed | 0.5 m/s |
| Position Accuracy | ±10 μm/full scale |
| Repeatability | ±5 μm /full scale |
| Flatness | ±30 μm /full scale |
| Straightness | ±15 μm /full scale |
| Pitch | ±15 Arc-sec |
| Yaw | ±15 Arc-sec |
| Orthogonality | ±20 μm |
| Z-Axis Travel | 150~200 mm motor-controlled |
| Pay Load | 150~200 mm motor-controlled |
| Vibration Isolation Table | Use |
Working Table, Control Box, Cover: Discussion
Loading/Unloading & Host Communications
| PassLine | RS 232 |
|---|---|
| Automatic Loading | For nominal panel size only. Front loading type |
| Cassette Port | Customer specification |
| Substrate alignment | On Chuck |
| Hardware Intergration | OK |
Computer Station
| Model | General Desktop |
|---|---|
| Monitor | LCD monitor |
| I/O ports | RS232, USB2.0 |
Cf. The others
- Warranty:1 year after AT
- Final data out format: Nano-View offers basic format
Theory and Application Areas
MSR-6G
The reflectance spectrum is defined as the ratio of the reflected intensity over the incident intensity of light. Film : d, nf(λ), kf(λ), Eg; Substrate : ns(λ), ks(λ), I(λ), R(λ)
Application Areas
- Semiconductors: Poly-Si, GaAs, GaN, InP, ZnS + Si, Ge, SiGe
- Dielectrics: SiO2, TiO2, TaO5, ITO, ZrO2, Si3N4, Photoresist, ARC
- Display(including LCD, PDP, OLED, CRT): a-Si, n+-a-Si, Gate-SiNx MgO, Alq, ITO, PR, CuPc, NPB, PVK, PAF, PEDT-PSS, Oxide, Polyimide
- Optical coating: Hard coating, Anti-reflection coating, Color Filters
- Solar cell: Doping a-Si(i-type, n-type, p-type), TCO(ZnO, SnO, ITO)
- Polymers: PVA, PET, PP, Dye, Npp, MNA, TAC, PR.
- Recordable materials: Photosensitive drum, Video head, Photo masks, Optical disk.
- Other: CRT Photoresist film, Shadow masks, Thin metal films, Laser mirrors.