MEI Solar Evolution - Optimized for Solar PV Wafer Clean and Etch

The MEI Solar Evolution high throughput wet processing systems are in-line, configurable, automated, dry to dry modular, linear batch immersion systems made for high throughput at a low cost. They are designed to handle photovoltaic/ solar wafers for many applications.

Designed to maximize throughput and yield.

Custom process design for many solar manufacturing applications
Low cost of ownership
High reliability
Designed for Safety
Fail Safe automation interlocked to prevent operator access
Break away end effectors
Top or rear exhaust options with optimum air flow
Unique DRYING system, providing minimum Oxide growth.
Flexible Process design -Acidic or alkaline etching Multiple recipe management

(photo shown is one implementation: System layouts and features configurations vary)

Specifications

High throughput with multiple robots
200 wafer carrier cassettes
Extra wide tanks for multiple carriers
Input and output scales for wafer thinning metrics
Six inputs and outputs with automated stagingTop or rear exhaust connections available

Benefits

Flexible and Upgradeable
Easy to Use and Well Controlled
Tailored
Production Ready
Designed for Safety
Maintenance Friendly
Reliable
Supported

Applications

Silicon Wafer Production | Wafer Block | Silicon Ingot Cleaning

Oxide Etch—for Solar Cell, Ingot, Chunk & Filament
Remove contaminated native oxide layer & reduce humidity for re-growth

Solar Cell Cleaning

Incoming Cell Clean- Solar Wafer Pre Cleaning Oxide Etch
Organic & particle removal to prep surface for next process
Solar Wafer Saw Damage Removal – Damage Etch removal
Eliminate irregular surface & material defects induced during ingot slices (multi-crystaline)
Texturization -Create roughened surface to reduce light lost from reflection (monocrystaline)