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    PVD Cleaning Solutions

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    For PECVD and PVD Chambers UltraSOLV® Chamber Cleaning Products eliminate ScotchBrite and commercial grades of sand paper in PM procedures for Roth & Rau, Centrotherm AG, OTB Solar and Applied Materials process chambers. Be it CVD or PVD ErgoWRENCH® ErgoSCRUB® and ScrubWRIGHT™ combined with ScrubPAD, ScrubDISK® ScrubBELT® offer production proven performance to remove process residues in less time, with less cost and damage to critical Vacuum Chamber Components.

    Foamtec International for PVF

    Benifits

    • PECVD Chamber Cleaning can be accomplished much more quickly ensuring greater uptime and with much less labor for lower costs.
    • PECVD Cleaning operations can be greatly shortened by the use of UltraSOLV® Chamber Cleaning products which are designed to remove CVD SiNx process reside from door sections

    Applications

    • CVD
    • PVD chamber deposition removal