S3 Alliance - Supply, Service, Solutions
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Semiconductor / MEMS
Process Equipment
Backgrinding
100 - 200mm Wafer Grinder
50 - 150mm Wafer Grinder
100 - 200mm Edge Profiler
Refurbished Wafer Grinders
Dry Cleaning
Semi automatic CO2 cleaning
Fully automatic CO2 Cleaning
200-300mm automatic CO2 Cleaning
Back end CO2 Cleaning
UV Ozone Cleaning
CMP
200 - 300mm Failure Analysis and R&D
75 - 200mm Production CMP
150 - 300mm Production CMP
50 - 200mm R&D CMP
Remanufactured CMP Systems
Remanufactured Post CMP Scrubber Systems
Slurry Delivery Systems
nVision Optical Endpoint
ViPRR IPEC Carrier Upgrade
ViPRR Wafer Carriers
Mask
Mask Cleaning
Metallization
PVD Systems
Metrology
Non-Contact Thickness Metrology
UltraMap-100B
UltraMap-300
Sigmatech 9600M
UltraMap 300IR
Sigmatech APBP
UltraMap-TSV
Wafer Transfer
Batch Transfer
Cassette to Cassette Manual Transfer
Sorters
Stockers
Hydrogen Purification
Bench Top Hydrogen Purifiers
Tool & Lab Hydrogen Purifiers
Fab-wide Hydrogen Purifiers
High-Flow Micro-Channel Hydrogen Purifier Systems
Hydrogen Separators and Separation Membranes
Parts & Consumables
CVD
Electrostatic Chucks
Heater Pedestals
Etch
Electrostatic Chucks
Mask
Individual Compact Mask Box
Metrology
Four Point Probe Heads
Photolithography
Stepper Chucks
Wafer Boxes
50mm to 200mm Shipping Box
Al2O3 Spare Parts
Head Motor & Gearbox repair
Quartz Parts
Retaining Rings
SiC Spare Parts
Silicon Rings and Spare Parts
Wafer Polish Pads
Service
CMP
Grinding
Robot Repair
Brooks
Equipe/PRI
GenMark
Rorze Robots
Other Products
Wet Process
Thin Film Deposition
Facility Hookup
Modules
Inert Gas Floor Module
PCW Floor Module
Chemical Floor Module
DI Floor Module
View Tile
Safety Frame for RAF
Sub-fab DI Utility Module
Sub-fab Utility Module
Vacuum Pump Module
About Modularisation
Modules by Tool Type
Fabrication
Cleaning Products
ALD
CVD
Etch
Ion Implantation
PVD
Photolithography
Screen Printing
Equipe/PRI Robot Repair
Request more information
S3-Alliance can provide the following services for PRI Robots and controllers.
ATM Robot Repair
ATM-Series Robot & ESC-Series Repair
Controller Repair
Qualification Test
Repair & Refurbish Program Available
