Nikon, AMSL, Canon, Stepper Chucks - Photo Chucks
SKC Solmics offers several different types of refurbishment and upgraded wafer chucks for different steppers, ASML, Canon, Nikon.
They can provide two different styles of wafer chucks the Ring Chuck and the Pin Chuck. These are manufactured as direct replacements of the OEM wafer chucks at a significant cost reduction to the customer.
While the Ring Chuck will meet most customer requirements, the Pin Chuck offers a significant decrease in the surface contact area on the wafer backside.
This enables the customer to realize many benefits:
- Minimizes effects of backside particle contamination of the wafer
- Drastically decreases incidents of hotspots (local defocused area)
- Provides for better product yield
- Less hotspots and vacuum errors means increased equipment availability