Electrostatic Chucks
Polyimide ESCs
Polyimide ESCs are widely used on semiconductor manufacturing equipment such as those made by Tokyo Electron, LAM & Applied Materials.
SKC Solmics has developed an extensive amount of experience in refurbishing Polyimide E-chucks providing an expedient turnaround to the customer and using a transparent procedure for tracking parts from the time of receipt to the final shipping. Detailed reports are provided in case an E-chuck is difficult to refurbish and returned.
Ceramic ESCs
SKC Solmics offers superb Ceramic ESC refurbishing services for several toolsets like TEL (Tokyo Electron), Applied Materials, Novellus, LAM and others.
Once received from the customer, all ESC’s go through rigorous inspection to assure that the part is not damaged beyond repair, if it is, a report is issued describing the problem.
Etch - ESC's new or refurbished for the following toolsets:
Tokyo Electron - ( SCCM, DRM, UNITY, IEM )
LAM ( EXELAN, RAINBOW, TCP )
Applied Materials ( DPS, Poly, Metal, e-Max, Super-e Oxide )
VARIAN