SiC Boats, Tubes and Spare Parts
With various features such as high stiffness, stability at high temperatures, anti-corrosiveness and high thermal conductivity, Si-SiC is one the most promising materials among fine ceramics.
High pure Si-SiC Tube, Boat is stabilized at high temperature over 1,200°C, so it has significantly contributed to improvement of quality and efficiency in semiconductor diffusion process, atmospheric pressure CVD and LP-CVD process.
In addition, as the ring-type jig, and cathode etc for the etcher process have been replaced with Si-SiC, life time is significantly increased, contributing to cost saving
Specifications
|
Purity % |
99.99 |
|
Bulk Density [g/cc] |
3.02 |
|
Vickers Hardness [GPa] Load0.5Kg HVI-9.807N |
21~22 |
|
Bending Strength [MPa] |
250 |
|
Compressive Strength [Mpa] |
2700 |
|
Youngs Modulus [Gpa] |
270 |
|
Poissons Ratio |
0.24 |
|
Thermal Conductivity [W/mK] |
175 |
|
Thermal Expansion [x10-6/°C] |
4.3 |
|
Heat Shock Strength [△T°C] |
400 |
|
Specific Heat [RT] (J/kg.K) |
0.68 |
|
Max Useable Temperature [°C] |
1300 |
|
Volume Resistivity [Ω. ㎝] |
10-1 |
|
Dielectric Strength [V/m] |
35 X 106 |
|
Dielectric Constant [25°C 1MHZ] |
2.7 |
Benefits
- Chemical properties : Si-SiC is a vary stable composite and resistant against solutions
- Electric/mechanical properties : Pure Si-SiC crystal is insulated in ambient temperature but its properties are variable depending on types and amounts of impurities.
- CVD-SiC Coating products : CVD coating lets surface layer be more compact, preventing impurities from diffused and emitted and increases anti-corrosiveness against acid solution.
Applications
|
BOAT |
case-shaped product to transfer wafer from thermal oxide diffusion CVD process to the next process |
|
TUBE |
product boat products in thermal oxide CVD process |
|
CAP |
supporting SiC and insulating to prevent internal loss of heat |
|
Other process/OLED device products |
types of semiconductor tools & fixtures such as ring type, large plates and susceptors, industrial and cutting tools, mechanical seals, high temperature, springs, and engine parts |