Quartz Belljars, Boats, Tubes and Spare Parts
Quartz developed as high performance lamp gy GE (General Electric) is largely divided into diffusion part and spare part SOLMICS mainly produces the latter one.
Although it is quick-consumed disadvantageously, it is continuously used for high capacity wafer integration and large-sized LCD plate owing to its high purity and transparency.
Benefits
- High purity properties,excellent electric insulation,low expansion and less gas content
- Specific heat and conductivity : transparent quartz has 20~1,000oC specific heat and 0~100 (1.3~1.5 w/mk)oC conductivity
Applications
- Focus Ring
- 2-step Ring
- Belljar
- Boat
- Tube
- Cap
- Bath
- Other products : wide pockets, shadow rings, base plates, lifter pins, shield rings, etc