Semiconductor/MEMs
Process Equipment
Facilities Equipment
Parts & Consumables
- CMP Conditioning Discs
- CMP Polishing Pads
- CMP Retaining Rings
- CMP Slurry
- Chemical Heaters
- Deionized Water Heaters
- Dicing
- Electrostatic Chucks
- FOUP / FOSB
- Four Point Probe Heads
- Heater Pedestals
- High Purity Pumps
- MagLev Pumps
- Metal Cassettes
- Process Cassette/Carriers
- Reticle/Mask Handling
- Shipping Boxes
- Stepper Chucks
Service
Cleaning Products
Electrostatic Chucks
SKC Solmics offers superb Ceramic ESC refurbishing services for several toolsets like TEL (Tokyo Electron), Applied Materials, Novellus, LAM and others.
Once received from the customer, all ESC’s go through rigorous inspection to assure that the part is not damaged beyond repair, if it is, a report is issued describing the problem.
CVD - ESC's new or refurbished for the following toolsets:
AMAT, NOVELLUS