S3 Alliance - Supply, Service, Solutions

Electrostatic Chucks

SKC Solmics offers superb Ceramic ESC refurbishing services for several toolsets like TEL (Tokyo Electron), Applied Materials, Novellus, LAM and others. 

Once received from the customer, all ESC’s go through rigorous inspection to assure that the part is not damaged beyond repair, if it is, a report is issued describing the problem.

 

CVD - ESC's new or refurbished for the following toolsets:

 

AMAT, NOVELLUS