CVD Heater Pedestals
We have the capability to most common failure modes including uniformity issues, leaks and mechanical damage. All machining and testing is conducted in-house by our staff of precision machinists and fab engineers. SKC Solmics provides this value added service that allows end users to extend the life of their extensive investment in these consumable components by cleaning and refurbishing the Heater Pedestals allowing further utilization of the device for fabrication.
- Heater Pedestal is inspected, disassembled, and entered into customer specific database.
- Internal TC rods are removed and replaced.
- Ceramic face and body is restored using a proprietary cleaning process.
- Flatness, surface roughness, and ground connection capacitance is measured and documented.
- Competitive pricing and fast turnaround