Modules by Type
NEHP modules are pre-designed and customized for specific tool types. Contact us if you do not see your tool type maker, as we may be able to provide a module for your needs.
Companies
- Applied Materials
- ASML
- Canon
- DNS
- FSI
- Hitachi
- KLA Tencor
- Kokusai
- Lam Research
- Nikon Precision
- Novellus
- SEZ
- TEL
- ThermaWave
- Varian