S3 Alliance - Supply, Service, Solutions

Modules by Type

NEHP modules are pre-designed and customized for specific tool types. Contact us if you do not see your tool type maker, as we may be able to provide a module for your needs.

Companies

  • Applied Materials
  • ASML
  • Canon
  • DNS
  • FSI
  • Hitachi
  • KLA Tencor
  • Kokusai
  • Lam Research
  • Nikon Precision
  • Novellus
  • SEZ
  • TEL
  • ThermaWave
  • Varian