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Facility Hookup Modules

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NEHP Reduces Tool Installation Time to Wafer Out

NEHP provides modular solutions for manufacturing that are configurable to specific tool applications. Until recently, the Semiconductor and Solar Industries have had to stick-build the support systems for manufacturing equipment. NEHP simplifies that process, and saves time and money for our clients by using pre-designed modules. This modular method for 200mm and 300mm tools was developed by NEHP for fast and easy integration into your pre-existing process while simplifying design, pre-purchase, and installation.

NEHP modules in fab facility Inert Gas Floor Module PCW Floor Module Chemical Floor Module DI Floor Module View Tile Safety Frame for RAF Sub-fab Utility Module Sub-fab DI Utility Module Vacuum Pump Highlight: Inert Gas Floor Module Highlight: PCW Floor Module Highlight: Chemical Floor Module Highlight: DI Floor Module Highlight: View Tile Highlight: Safety Frame for RAF Highlight: Sub-fab Utility Module Highlight: Sub-fab DI Utility Module Highlight: Vacuum Pump Module