Semiconductor/MEMs
Process Equipment
Facilities Equipment
Parts & Consumables
- CMP Conditioning Discs
- CMP Polishing Pads
- CMP Retaining Rings
- CMP Slurry
- Chemical Heaters
- Deionized Water Heaters
- Dicing
- Electrostatic Chucks
- FOUP / FOSB
- Four Point Probe Heads
- Heater Pedestals
- High Purity Pumps
- MagLev Pumps
- Metal Cassettes
- Process Cassette/Carriers
- Reticle/Mask Handling
- Shipping Boxes
- Stepper Chucks
Service
Cleaning Products
About NEHP's Semiconductor Modularization
Modularization Reduces Construction Time and Cost
P&ID with NEHP modules noted in orange. Simply source is the interconnecting pipe work.
The advantages of modularization include significant financial and time savings. In addition, these savings can materialize into a competitive advantage for your business. With NEHP modules replacing stick-built construction, the following savings are typically realized:
- Time to installation reduced by 17%-47%
- Cost of installation reduced by 10%-20%
- Footprint reduced 10%-15%
- On-site labor reduced up to 44%
- On-site activity reduced by 50%
- Complexity of procurement reduced with fewer vendors and fewer purchase orders
The Benefits of Modularization Over Stick-Built
NEHP modules replace complicated and costly stick-built gas and water support systems with pre-designed units that fit conveniently into the fab room floor or sub-fab room, depending upon the application. NEHP keeps your project's design and construction process simple with pre-designed modules for specific tool types. Simply select your tool type and find detailed specifications for the available modules. As this P&ID illustrates, the integration of NEHP modules simplifies design, procurement and construction—all that you have left to source is the interconnecting pipe work.
By utilizing pre-designed modules from NEHP, the design, procurement and construction processes are streamlined—saving you time and money.
Combination Inert Gas & PCW Module
- A Simplified Design Phase
- 3D drawings streamline engineering approval
- 2D submittal facilitates architectural planning and layouts
- Rapid construction start
- Modular systems reduce development costs (14% per tool and 22% overall)
- Seamless Integration with Your Procurement Process
- Catalog ordering
- Consistency in design and construction
- Utility Connection Points available before construction starts
- Streamlined Construction
- Off-site clean-room prefab reduces costs
- Detailed layout of services taken out of the field (up to 10% to 25% space savings)
- Trades congestion at tool hookup areas minimized
- Parallel hookup construction aligned with Tier 1 tool commissioning
- Delays due to field changes/change orders, schedule issues, and budget overruns reduced
- Shipped proudly with a Union fabrication stamp guaranteeing acceptance of the modules at your job site
- Pre-built and Customized to Your Specific Tool Type
- Flexible and customizable, including the ability to integrate modules into virtually any floor system
- Expandable
- Easy to maintain
- Safe and reliable