Wafer Transfer
Comet series of state-of-the-art systems open new paths of innovation applied to wafer handling and storing. Throughout the world, our service centers provide today's best automation tools to the semiconductor industry from diffusion/wet to packaging process and photovoltaic applications.
R2d automation offers a wide range of transferring machine, sorters, sorters with OCR, ID readers.
Equipment listing:
- Gemini
- Gemini is the world’s smallest wafer transfer system.
- Comet 2 station
- The Comet 2 station is the easy way to transfer 25 wafers from cassette to cassette or cassette to boat.
- This Comet is fast, clean, reliable and accurate.
- Customized for your different boats and carriers.
- Comet 3 station
- Using Comet 3 station BTB is the easiest way to transfer 25 wafers face to face (or back to back).
- Proximity or same slot process.
- The best mass transfer system for a safe back to back transfer.
- Adapted for Solid Source,WET or LTO process.
- Comet vertical sorter
- The CVS insures the transfer of a complete batch of wafers from a transport carrier into a process carrier.
- Thanks to its wafer scanning, Comet CVS detects empty slots and adds dummies when necessary.
- With the TAG reader, Comet CVS keeps in memory all carriers.
- ID reader
- Comet ID Reader checks your tag carrier then reads each wafer scribe.
- The Comet ID Reader sends the information to your Host with SECSII Gem commands
- Easy to use and very small footprint, the COMET ID Reader is the best tool to avoid lot errors
- Designed for using 200mm – 8'' , SECSII GEM communication, notch aligner and OCR system
- Sorters w / w out OCR
- The COMET Sorters are compact, fast, reliable and meet your different requirements.
- The COMET Sorter with OCR is integrating an optical notch aligner and OCR system for front and back scribe reading
- Comet provides standard recipes as ID Sorting, Randomizing, Compacting, using or not scribe criteria’s