nTrepid 150 - 300mm Production CMP
Simple, Reliable, Affordable 300mm CMP
Strasbaugh’s nTrepid is a highly configurable dry-in-dry-out , 300mm, CMP system that combines the industry’s most proven rotary platform with the most requested design features and technology. The nTrepid offers the functionality and process flexibility required to support a broad range of CMP applications, while maintaining high reliability and affordability in a compact footprint.
nTrepid Benefits
- Built for high reliability
- Simple design
- Small footprint
- Process flexibility
- Uses proven technology
- Low Capital Cost
- Competitive Throughput
- Superior Process Results
- 200mm & 300mm Bridge Tool
nTrepid Technologies
- Advanced Carriers
- Multi-Zone Back Pressure
- nVisionTM Optical Endpoint Detection
- Integrated metrology
- Powered Pad Conditioning
- Integrated Cleaning