Slurry Delivery Systems
equest more information
Within the semiconductor and electronics industries, the need for precise chemical blending and distribution controls of chemical is critical for applications such as CMP, Plating and Lithography processes. FAST Technologies has in depth experience in these areas, as have the expertise to provide a cost effective solution for your process requirement.
- Delivery of slurry on demand to multiple tools
- Fully automatic
- Up to three drum reserve or tote
- PLC control
- Touch screen interface
- Programmable access levels with individual passwords
- Maintenance and Engineering control/programming screens
- CE Mark, designed for maximum safety
- PLC control
- Touch screen interface
- Programmable access levels with individual passwords
- Maintenance and Engineering control/programming screens
- Accessible recipe editing
- CE Mark, designed for maximum safety
- FM4910 construction
- Automatic Cleaning & Flushing
- Alarm interface with CMP Tools – Data logging capability, KPIV
- Loop pressure control, with redundancy
- Peroxide mixing capability
- Leak Detection
- Levitronix Pumping System
- Filtration
- Customised footprint