Remanufactured Post CMP Scrubber Systems
Rebuilt to look, operate and perform like a new system
Axus Technology maintains an inventory of high quality new, used and refurbished process equipment. Standard specifications for these systems are provided below. We also specialize in providing engineering modifications and enhancements to these systems. This capability enables us to configure these systems for unique or non-standard applications, which may result in changes or improvements to these specifications. Please contact us to discuss your specific requirements.
Specifications:
- Fully automatic cassette-to-cassette double-sided scrubber for all wafer cleaning applications
- Dual scrub stations for two-step processing
- Wet input station prevents wafer drying before scrubbing
- Final rinse with high-speed spin dry
- Optional megasonics
Suitable for:
- Post-CMP cleaning of device wafers with dielectric or metal materials
- Post-polish or post-grind cleaning of bare substrates of any material
- Any common wafer cleaning application
- Square or rectangular substrates
- 50 - 300mm compatible
To request more information on OnTrak DSS Post CMP Scrubbers, click here