Remanufactured CMP Systems
Rebuilt to look, operate and perform like a new system
Axus Technology maintains an inventory of high quality new, used and refurbished process equipment. Standard specifications for these systems are provided below. We also specialize in providing engineering modifications and enhancements to these systems. This capability enables us to configure these systems for unique or non-standard applications, which may result in changes or improvements to these specifications. Please contact us to discuss your specific requirements for:
Remanufacturing capabilities:
- IPEC/Westech Model 372M, 472 676 & 776
- SpeedFam Auriga, Auriga-C & Auriga-EC
- AMAT Mirra Systems
Contact us for:
- IPEC Spares
- SpeedFam Spares
- AMAT refurbishment
- AMAT Conditioning Arm refurbishment
- Robot repair
- Retaining rings