Remanufactured Backgrinding Systems
Rebuilt to look, operate and perform like a new system
Axus Technology maintains an inventory of high quality new, used and refurbished process equipment. Standard specifications for these systems are provided below. We also specialize in providing engineering modifications and enhancements to these systems. This capability enables us to configure these systems for unique or non-standard applications, which may result in changes or improvements to these specifications. Please contact us to discuss your specific requirements.
- The DFG841 is a fully automatic in-feed grinder for thinning wafers in a batch process.
- Two-spindle, two-chuck table specifications and a robot arm with a same-cassette return function.
- The robot arm vacuum ensures that even thin ground wafers, which are prone to warping, are corrected to the required flatness for trouble free handling.
Other systems available:
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Okamoto VG-502MKII8
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Okamoto VG-202MKII
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Okamoto VG-201
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Okamoto GNX200
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Disco DFG860
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Disco DFG8540
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Disco DFG8560