Linde EcoSnow VersaClean 1200™ Co2 Cleaning System
The Eco-Snow® advanced VersaClean 1200™ System removes sub-micron particle contamination, post-etch residues, veils and fences, as well as thin-film organic contaminates from a variety of substrate materials and sizes using a unique carbon dioxide (CO2) snow cleaning process. Eco-Snow cleaning is a fast, environmentally friendly, “all dry” non-contact process that offers numerous advantages over conventional wet cleaning systems.
Specifications
- Processing at atmospheric pressure
- High throughput
- Environmentally controlled Class 1 cleaning chamber
- Advanced ESD control
- Internal dew point monitor
- Compact footprint
- Simple facilitization
- GEM/SECS-II software
- CE marked, Semi S2, S8 compliant
Benefits
- Low cost of ownership
- Multiple process capability
- No DI water or chemical waste
- Non-damaging clean of fragile structures
- High PRE down to nano particle size
- Capable of multiple process steps
- Single step dry process
- High MTBF, low MTTR